[4-2] Design and/or fabrication of devices

12:00 PM - 12:15 PM JST(3:00 AM - 3:15 AM UTC)

[4-2-04] Active Substrate Support Using Piezoelectric Thin Films

*Ertug Simsek¹, Bas Jansen², Marcelo Ackermann¹, Muharrem Bayraktar¹ (1. Industrial Focus Group XUV Optics, MESA+Institute for Nanotechnology, University of Twente, 2. ASML Netherlands BV, De Run 6501, 5504 DR Veldhoven, The Netherlands)