[Session 5] Session 5: Atomistic/Ab-initio Modeling

9:50 AM - 10:10 AM JST(12:50 AM - 1:10 AM UTC)

[Session_5-03] Atomistic Insights into NH₃ Plasma-Induced Carbon Depletion and Nitrogen Incorporation in SiCOH Low-K Dielectrics

*Sefa Dag¹, El Mehdi Bazizi¹, Subi Kengeri¹, Rohit Gupta¹ (1. Applied Materials, Inc.)