[A-4] Ultrasonics

11:00 AM - 11:15 AM JST(2:00 AM - 2:15 AM UTC)Candidate for Academic Incentive AwardCareer Explorer

[A-4-01] Study on forces generated through cylinder with small through-hole from an ultrasonic vibration surface

◎△Yuta Fujioka¹, Yimeng Wang¹, Hideki Tamura², Manabu Aoyagi¹ (1. Muroran Inst. of Tech., 2. Tohoku Inst. of Tech.)

Keywords:

Acoustic radiation force,Acoustic streaming,Finite element analysis,Non-contact,Ultrasonic chuck