Presentation Information

[A-4-01]Study on forces generated through cylinder with small through-hole from an ultrasonic vibration surface

〇Yuta Fujioka1, Yimeng Wang1, Hideki Tamura2, Manabu Aoyagi1 (1. Muroran Inst. of Tech., 2. Tohoku Inst. of Tech.)

Keywords:

Acoustic radiation force,Acoustic streaming,Finite element analysis,Non-contact,Ultrasonic chuck