[C-3_C-4] Optoelectronics / Lasers and Quantum Electronics

2:45 PM - 3:00 PM JST(5:45 AM - 6:00 AM UTC)

[C-3_C-4-54] CPM phase shift grating by interference lithography

〇Hirotaka Yamada¹, Yohei Nawaki¹, Keisuke Ota¹, Kazuyuki Tsuruoka¹ (1. Ushio Inc)

Keywords:

inerference lithography,DFB laser,phase shift grating