Presentation Information
[C-3_C-4-54]CPM phase shift grating by interference lithography
〇Hirotaka Yamada1, Yohei Nawaki1, Keisuke Ota1, Kazuyuki Tsuruoka1 (1. Ushio Inc)
Keywords:
inerference lithography,DFB laser,phase shift grating
inerference lithography,DFB laser,phase shift grating