1969 Conference on Solid State Devices

1969 Conference on Solid State Devices

Sep 26 - Sep 27, 1969Sankei Hall, Tokyo, Japan
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International Conference on Solid State Devices and Materials
1969 Conference on Solid State Devices

1969 Conference on Solid State Devices

Sep 26 - Sep 27, 1969Sankei Hall, Tokyo, Japan

[3-4]Defects In Silicon Generated Ion Implantation

T. Tsuchimoto, T. Ikeda, T. Tokuyama(1.Hitachi Ltd.)
https://doi.org/10.7567/SSDM.1969.3-4
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