1969 Conference on Solid State Devices

1969 Conference on Solid State Devices

Sep 26 - Sep 27, 1969Sankei Hall, Tokyo, Japan
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International Conference on Solid State Devices and Materials
1969 Conference on Solid State Devices

1969 Conference on Solid State Devices

Sep 26 - Sep 27, 1969Sankei Hall, Tokyo, Japan

[6-1]Low Temperature Vapor Deposition of ZrO2 Films on Si Surfaces

K. Hoh, T. Sugano(1.University of Tokyo)
https://doi.org/10.7567/SSDM.1969.6-1
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