1970 Conference on Solid State Devices

1970 Conference on Solid State Devices

Sep 21 - Sep 22, 1970The Tokyo Chamber of Commerce and Industry, Tokyo, Japan
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International Conference on Solid State Devices and Materials
1970 Conference on Solid State Devices

1970 Conference on Solid State Devices

Sep 21 - Sep 22, 1970The Tokyo Chamber of Commerce and Industry, Tokyo, Japan

[1-2]Electron Microscopic Studies of Crystal Defects in Boron and Phosphorus Implanted Silicon

M. Tamura, T. Ikeda, T. Yoshihiro(1.Hitachi Ltd.)
https://doi.org/10.7567/SSDM.1970.1-2
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