1970 Conference on Solid State Devices
Sep 21 - Sep 22, 1970The Tokyo Chamber of Commerce and Industry, Tokyo, Japan
1970 Conference on Solid State Devices
Sep 21 - Sep 22, 1970The Tokyo Chamber of Commerce and Industry, Tokyo, Japan
[1-3]Radiation Enhanced Diffusion and It's Application for Device Fabrication
T. Abe, Y. Ohmura, M. Konaka, H. Ohtsubo, M. Kanazawa, K. Koike(1.Tokyo Shibaura Electric Co., Ltd.)
