1970 Conference on Solid State Devices

1970 Conference on Solid State Devices

Sep 21 - Sep 22, 1970The Tokyo Chamber of Commerce and Industry, Tokyo, Japan
International Conference on Solid State Devices and Materials
1970 Conference on Solid State Devices

1970 Conference on Solid State Devices

Sep 21 - Sep 22, 1970The Tokyo Chamber of Commerce and Industry, Tokyo, Japan

[2-1]Preferential Etching of GaAs and It's Application to Devices

Y. Tarui, Y. Komiya, Y. Harada(1.Electrotechnical Lab.)
https://doi.org/10.7567/SSDM.1970.2-1