1971 Conference on Solid State Devices

1971 Conference on Solid State Devices

Sep 1 - Sep 2, 1971The Tokyo Chamber of Commerce and Industry, Tokyo, Japan
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International Conference on Solid State Devices and Materials
1971 Conference on Solid State Devices

1971 Conference on Solid State Devices

Sep 1 - Sep 2, 1971The Tokyo Chamber of Commerce and Industry, Tokyo, Japan

[7-3]Reverse Annealing Behavior of Boron- and Phosphorus-Implanted Silicon

N. Yoshihiro, T. Ikeda, M. Tamura, T. Tsuchimoto, T. Tokuyama(1.Hitachi Ltd.)
https://doi.org/10.7567/SSDM.1971.7-3
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