1972 Conference on Solid State Devices

1972 Conference on Solid State Devices

Aug 30 - Aug 31, 1972The Tokyo Chamber of Commerce and Industry, Tokyo, Japan
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International Conference on Solid State Devices and Materials
1972 Conference on Solid State Devices

1972 Conference on Solid State Devices

Aug 30 - Aug 31, 1972The Tokyo Chamber of Commerce and Industry, Tokyo, Japan

[3-3]INPROVEMENT OF THE SHALLOW BASE TRANSISTOR TECHNOLOGY BY USE OF A DOPED POLY-SILICON DIFFUSION SOURCE

M. Takagi, K. Nakayama, C. Terada, H. Kamioka(1.IC Engineering Department, Fujitsu Limited)
https://doi.org/10.7567/SSDM.1972.3-3
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