1972 Conference on Solid State Devices

1972 Conference on Solid State Devices

Aug 30 - Aug 31, 1972The Tokyo Chamber of Commerce and Industry, Tokyo, Japan
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International Conference on Solid State Devices and Materials
1972 Conference on Solid State Devices

1972 Conference on Solid State Devices

Aug 30 - Aug 31, 1972The Tokyo Chamber of Commerce and Industry, Tokyo, Japan

[4-2]Observation of Lattice Defects in Ion-Implanted Si Wafer by A Double Crystals Spectrometer Method

Seigo KISHNO, Atsuko NODA(1.Central Research Laboratory, Hitachi, Ltd.)
https://doi.org/10.7567/SSDM.1972.4-2
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