1972 Conference on Solid State Devices
Aug 30 - Aug 31, 1972The Tokyo Chamber of Commerce and Industry, Tokyo, Japan
1972 Conference on Solid State Devices
Aug 30 - Aug 31, 1972The Tokyo Chamber of Commerce and Industry, Tokyo, Japan
[4-3]Study on Three-Dimensional Distribution of Implanted Ions by He+ Backscattering Technique
Hiroshi ISHIWARA, Seijiro FURUKAWA, Hideki MATSUMURA, Nobuyoshi NATSUAKI(1.Department of Physical Electronics, Faculty of Engineering Tokyo Institute of Technology)
