1972 Conference on Solid State Devices

1972 Conference on Solid State Devices

Aug 30 - Aug 31, 1972The Tokyo Chamber of Commerce and Industry, Tokyo, Japan
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International Conference on Solid State Devices and Materials
1972 Conference on Solid State Devices

1972 Conference on Solid State Devices

Aug 30 - Aug 31, 1972The Tokyo Chamber of Commerce and Industry, Tokyo, Japan

[6-1]Properties of MOS Structures Prepared on Substrates having Ion Implanted Impurity Distribution Profile

T. Warabisako, I. Yoshida, T. Tokuyama(1.Central Research Laboratory, Hitachi Ltd.)
https://doi.org/10.7567/SSDM.1972.6-1
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