1974 Conference on Solid State Devices

1974 Conference on Solid State Devices

Sep 2 - Sep 3, 1974The Tokyo Chamber of Commerce and Industry, Tokyo, Japan
Back
International Conference on Solid State Devices and Materials
1974 Conference on Solid State Devices

1974 Conference on Solid State Devices

Sep 2 - Sep 3, 1974The Tokyo Chamber of Commerce and Industry, Tokyo, Japan

[B2-2]A Novel Planar Multilevel Interconnection Technology Utilizing Polyimide

SEIKI HARADA, KIKUJI SATO, ATSUSHI SAIKI, TAKESHI KIMURA TOSHIO OKUBO, KIICHIRO MUKAI(1.Central Research Laboratory, Hitachi Ltd.)
https://doi.org/10.7567/SSDM.1974.B2-2
Download PDFDownload PDF
Back