International Conference on Solid State Devices and Materials

1974 Conference on Solid State Devices

Sep 2 - Sep 3, 1974The Tokyo Chamber of Commerce and Industry, Tokyo, Japan

International Conference on Solid State Devices and Materials

1974 Conference on Solid State Devices

Sep 2 - Sep 3, 1974The Tokyo Chamber of Commerce and Industry, Tokyo, Japan

[B2-3]IPOS Scheme : A New Isolation Technique for Integrated Circuits

S. Nakajima, Y. Watanabe, T. Yokoyama, K. Kato(1.Musashino Electrical Communication Laboratory Nippon Telegraph and Telephone Public Corporation)

https://doi.org/10.7567/SSDM.1974.B2-3