1974 Conference on Solid State Devices

1974 Conference on Solid State Devices

Sep 2 - Sep 3, 1974The Tokyo Chamber of Commerce and Industry, Tokyo, Japan
Back
International Conference on Solid State Devices and Materials
1974 Conference on Solid State Devices

1974 Conference on Solid State Devices

Sep 2 - Sep 3, 1974The Tokyo Chamber of Commerce and Industry, Tokyo, Japan

[B2-4]Defects in Heavily Phosphorus-Implanted Si Observed after Drive-in Process

T. Ikeda, M. Tamura, N. Yoshihiro, T. Tokuyama(1.Central Research Laboratory, Hitachi Ltd.)
https://doi.org/10.7567/SSDM.1974.B2-4
Download PDFDownload PDF
Back