1974 Conference on Solid State Devices

1974 Conference on Solid State Devices

Sep 2 - Sep 3, 1974The Tokyo Chamber of Commerce and Industry, Tokyo, Japan
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International Conference on Solid State Devices and Materials
1974 Conference on Solid State Devices

1974 Conference on Solid State Devices

Sep 2 - Sep 3, 1974The Tokyo Chamber of Commerce and Industry, Tokyo, Japan

[B3-2]Impurity Concentrotion Profiles of Diffused Boron and Phosphorus in SiO2/Si and Poly Si/SiO2/Si Structures Measured by Auger Electron Spectroscopy

T. Inoue, S. Horiuchi, S. Yoshii(1.Toshiba R and D Center, Tokyo Shibaura Electric Co., Ltd.)
https://doi.org/10.7567/SSDM.1974.B3-2
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