1975 Conference on Solid State Devices

1975 Conference on Solid State Devices

Sep 1 - Sep 2, 1975The Tokyo Chamber of Commerce and Industry, Tokyo, Japan
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International Conference on Solid State Devices and Materials
1975 Conference on Solid State Devices

1975 Conference on Solid State Devices

Sep 1 - Sep 2, 1975The Tokyo Chamber of Commerce and Industry, Tokyo, Japan

[A-1-2]MICROFABRICATION TECHNIQUE BY GAS PLASMA ETCHING METHOD

H. KOMIYA, H. TOYODA, T. KATO, K. INABA(1.Central Research Lab., Mitsubishi Electric Corp.)
https://doi.org/10.7567/SSDM.1975.A-1-2
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