1975 Conference on Solid State Devices

1975 Conference on Solid State Devices

Sep 1 - Sep 2, 1975The Tokyo Chamber of Commerce and Industry, Tokyo, Japan
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International Conference on Solid State Devices and Materials
1975 Conference on Solid State Devices

1975 Conference on Solid State Devices

Sep 1 - Sep 2, 1975The Tokyo Chamber of Commerce and Industry, Tokyo, Japan

[A-1-3]Microfabrication of Anti-Reflective Chromium Mask by Gas Plasmas

Haruhiko ABE, Kyusaku NISHIOKA, Setsuko TAMURA, Akira NISHIMOTO(1.Central Research Laboratories, Mitsubishi Electric Corp., 2.Kitaitami Works, Mitsubishi Electric Corp.)
https://doi.org/10.7567/SSDM.1975.A-1-3
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