International Conference on Solid State Devices and Materials

1975 Conference on Solid State Devices

Sep 1 - Sep 2, 1975The Tokyo Chamber of Commerce and Industry, Tokyo, Japan

International Conference on Solid State Devices and Materials

1975 Conference on Solid State Devices

Sep 1 - Sep 2, 1975The Tokyo Chamber of Commerce and Industry, Tokyo, Japan

[A-2-3]Application of Diffusion from Implanted Polysilicon to Bipolar Transistors

Y. AKASAKA, K. TSUKAMOTO, M. KAWAGUCHI, H. SATO, K. HORIE, H. KOMIYA(1.Central Research Laboratory, Kitaitami Works, Mitsubishi Electric Corp.)

https://doi.org/10.7567/SSDM.1975.A-2-3