1975 Conference on Solid State Devices

1975 Conference on Solid State Devices

Sep 1 - Sep 2, 1975The Tokyo Chamber of Commerce and Industry, Tokyo, Japan
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International Conference on Solid State Devices and Materials
1975 Conference on Solid State Devices

1975 Conference on Solid State Devices

Sep 1 - Sep 2, 1975The Tokyo Chamber of Commerce and Industry, Tokyo, Japan

[A-3-2]Micro-probe Auger Analysis of Si Migration in Al Metallization for LSI

T. Inoue, S. Horiuchi, H. Shimizu, T. Ishida(1.Toshiba R & D Center, Electrotechnical Lab. Nippon Electric Varian Co.)
https://doi.org/10.7567/SSDM.1975.A-3-2
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