1975 Conference on Solid State Devices

1975 Conference on Solid State Devices

Sep 1 - Sep 2, 1975The Tokyo Chamber of Commerce and Industry, Tokyo, Japan
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International Conference on Solid State Devices and Materials
1975 Conference on Solid State Devices

1975 Conference on Solid State Devices

Sep 1 - Sep 2, 1975The Tokyo Chamber of Commerce and Industry, Tokyo, Japan

[E-2-1]Physical and Technological Limits in Size of Semiconductor Devices

Takuo Sugano(1.Department of Electronic Engineering, the University of Tokyo)
https://doi.org/10.7567/SSDM.1975.E-2-1
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