1976 International Conference on Solid State Devices

1976 International Conference on Solid State Devices

Sep 1 - Sep 3, 1976The Tokyo Chamber of Commerce and Industry, Tokyo, Japan
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International Conference on Solid State Devices and Materials
1976 International Conference on Solid State Devices

1976 International Conference on Solid State Devices

Sep 1 - Sep 3, 1976The Tokyo Chamber of Commerce and Industry, Tokyo, Japan

[A-1-4]Anomalous Residual Defects in Silicon after Annealing of Through-Oxide Phosphorus Implanted Samples

N. Natsuaki, M. Tamura, M. Miyao, T. Tokuyama(1.Central Research Laboratory, Hitachi Ltd.)
https://doi.org/10.7567/SSDM.1976.A-1-4
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