1976 International Conference on Solid State Devices
Sep 1 - Sep 3, 1976The Tokyo Chamber of Commerce and Industry, Tokyo, Japan
1976 International Conference on Solid State Devices
Sep 1 - Sep 3, 1976The Tokyo Chamber of Commerce and Industry, Tokyo, Japan
[A-1-8]New Application of Se-Ge Glasses to Silicon Microfabrication Technology
A. Yoshikawa, H. Nagai, Y. Mizushima(1.Musashino Electrical Communication Laboratory, Nippon Telegraph and Telephone Public Corporation)
