1976 International Conference on Solid State Devices

1976 International Conference on Solid State Devices

Sep 1 - Sep 3, 1976The Tokyo Chamber of Commerce and Industry, Tokyo, Japan
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International Conference on Solid State Devices and Materials
1976 International Conference on Solid State Devices

1976 International Conference on Solid State Devices

Sep 1 - Sep 3, 1976The Tokyo Chamber of Commerce and Industry, Tokyo, Japan

[B-1-8]A Half-micron Gate GaAs FET Fabricated by Chemical Dry Etching

S. Takahashi, F. Murai, H. Kurono, M. Hirao, H. Kodera(1.Central Research Laboratory Hitachi Ltd.)
https://doi.org/10.7567/SSDM.1976.B-1-8
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