1977 Conference on Solid State Devices

1977 Conference on Solid State Devices

Aug 30 - Aug 31, 1977The Tokyo Chamber of Commerce and Industry, Tokyo, Japan
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International Conference on Solid State Devices and Materials
1977 Conference on Solid State Devices

1977 Conference on Solid State Devices

Aug 30 - Aug 31, 1977The Tokyo Chamber of Commerce and Industry, Tokyo, Japan

[A-1-1]Direct Electron Beam Writing of Devices and Circuits on Silicon

L. D. Yau, L. R. Thibault(1.Bell Laboratories)
https://doi.org/10.7567/SSDM.1977.A-1-1
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