1977 Conference on Solid State Devices

1977 Conference on Solid State Devices

Aug 30 - Aug 31, 1977The Tokyo Chamber of Commerce and Industry, Tokyo, Japan
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International Conference on Solid State Devices and Materials
1977 Conference on Solid State Devices

1977 Conference on Solid State Devices

Aug 30 - Aug 31, 1977The Tokyo Chamber of Commerce and Industry, Tokyo, Japan

[A-1-2]X-ray replication of masks by Synchrotron Radiation of INS-ES

T. Nishimura, H. Kotani, S. Matsui, O. Nakagawa, H. Aritome, S. Namba(1.Faculty of Engineering Science Osaka University)
https://doi.org/10.7567/SSDM.1977.A-1-2
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