1977 Conference on Solid State Devices
Aug 30 - Aug 31, 1977The Tokyo Chamber of Commerce and Industry, Tokyo, Japan
1977 Conference on Solid State Devices
Aug 30 - Aug 31, 1977The Tokyo Chamber of Commerce and Industry, Tokyo, Japan
[A-2-2]A NEW MOS PROCESS USING MoSi2 AS A GATE MATERIAL
T. Mochizuki, K. Shibata, T. Inoue, K. Ohuchi(1.Toshiba Reseach and Development Center Tokyo Shibaura Electric Co., Ltd.)
