1977 Conference on Solid State Devices

1977 Conference on Solid State Devices

Aug 30 - Aug 31, 1977The Tokyo Chamber of Commerce and Industry, Tokyo, Japan
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International Conference on Solid State Devices and Materials
1977 Conference on Solid State Devices

1977 Conference on Solid State Devices

Aug 30 - Aug 31, 1977The Tokyo Chamber of Commerce and Industry, Tokyo, Japan

[A-4-2]Effects of High Dose Rate Phosphorus Implantation into Silicon

M. Tamura, K. Yagi, N. Sakudo, K. Tokiguchi, T. Tokuyama(1.Central Research Laboratory, Hitachi Ltd.)
https://doi.org/10.7567/SSDM.1977.A-4-2
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