1977 Conference on Solid State Devices

1977 Conference on Solid State Devices

Aug 30 - Aug 31, 1977The Tokyo Chamber of Commerce and Industry, Tokyo, Japan
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International Conference on Solid State Devices and Materials
1977 Conference on Solid State Devices

1977 Conference on Solid State Devices

Aug 30 - Aug 31, 1977The Tokyo Chamber of Commerce and Industry, Tokyo, Japan

[A-5-2]LOW TEMPERATURE SILICON NITRIDE DEPOSITION USING MICROWAVE-EXCITED ACTIVE NITROGEN

M. Shibagaki, Y. Horiike, T. Yamazaki(1.Toshiba Research and Development Center Tokyo Shibaura Electric Co., Ltd.)
https://doi.org/10.7567/SSDM.1977.A-5-2
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