1977 Conference on Solid State Devices

1977 Conference on Solid State Devices

Aug 30 - Aug 31, 1977The Tokyo Chamber of Commerce and Industry, Tokyo, Japan
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International Conference on Solid State Devices and Materials
1977 Conference on Solid State Devices

1977 Conference on Solid State Devices

Aug 30 - Aug 31, 1977The Tokyo Chamber of Commerce and Industry, Tokyo, Japan

[A-5-3]Suppression of Oxidation-Induced Stacking Faults Formation in Silicon by High Pressure Steam Oxidation

N. Tsubouchi, H. Miyoshi, H. Abe(1.LSI Development Laboratory, Mitsubishi Electric Corp., 2.Computer Development Laboratories Limited)
https://doi.org/10.7567/SSDM.1977.A-5-3
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