Aug 30 - Aug 31, 1977The Tokyo Chamber of Commerce and Industry, Tokyo, Japan
[A-8-2]NEW IC PROCESS TECHNOLOGY
Shuichi Sato, Tadanori Yamaguchi, Douglas Ritchie, Karen Seaward, Jack Sachitano, Peter Burke(1.Tektronix Laboratories, Tektronix, Inc., 2.Emdex, A Division of Exxon Enterprises, Inc.)