1977 Conference on Solid State Devices
Aug 30 - Aug 31, 1977The Tokyo Chamber of Commerce and Industry, Tokyo, Japan
1977 Conference on Solid State Devices
Aug 30 - Aug 31, 1977The Tokyo Chamber of Commerce and Industry, Tokyo, Japan
[B-3-1]Analysis of Two-Dimensional Etching Effect on the Profiles of Fine Holographic Grating Made of Positive Photoresist AZ2400
K. Kodate, T. Kamiya, H. Takenaka, H. Yanai(1.Physics Laboratory, Japan Women's University, 2.Department of Electronic Engineering, University of Tokyo)
