1977 Conference on Solid State Devices

1977 Conference on Solid State Devices

Aug 30 - Aug 31, 1977The Tokyo Chamber of Commerce and Industry, Tokyo, Japan
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International Conference on Solid State Devices and Materials
1977 Conference on Solid State Devices

1977 Conference on Solid State Devices

Aug 30 - Aug 31, 1977The Tokyo Chamber of Commerce and Industry, Tokyo, Japan

[B-6-1]Anodic Oxidation of GaAs in Oxygen Plasma

K. Yamasaki, T. Sugano(1.Department of Electronic Engineering The University of Tokyo)
https://doi.org/10.7567/SSDM.1977.B-6-1
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