International Conference on Solid State Devices and Materials

1978 Conference on Solid State Devices

Aug 29 - Aug 30, 1978The Tokyo Chamber of Commerce and Industry, Tokyo, Japan

International Conference on Solid State Devices and Materials

1978 Conference on Solid State Devices

Aug 29 - Aug 30, 1978The Tokyo Chamber of Commerce and Industry, Tokyo, Japan

[A-5-2]Deep Levels Introduced by Iron Implantation in N-Type Silicon and Its Application to Switching Devices

H. Hayashi, T. Mamine, T. Matsushita, O. Kumagai, K. Nishiyama, K. Kaneko(1.SONY Corporation Semiconductor Development Division and Research Center)

https://doi.org/10.7567/SSDM.1978.A-5-2