1978 Conference on Solid State Devices
Aug 29 - Aug 30, 1978The Tokyo Chamber of Commerce and Industry, Tokyo, Japan
1978 Conference on Solid State Devices
Aug 29 - Aug 30, 1978The Tokyo Chamber of Commerce and Industry, Tokyo, Japan
[A-6-3]An Electron Beam Exposure System (VL-RI)
M. Sumi, M. Ninomiya, F. Chiba, M. Nakasuji, S. Sano, Y. Takeishi(1.Cooperative Laboratories, VLSI Technology Research Association)
