1978 Conference on Solid State Devices

1978 Conference on Solid State Devices

Aug 29 - Aug 30, 1978The Tokyo Chamber of Commerce and Industry, Tokyo, Japan
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International Conference on Solid State Devices and Materials
1978 Conference on Solid State Devices

1978 Conference on Solid State Devices

Aug 29 - Aug 30, 1978The Tokyo Chamber of Commerce and Industry, Tokyo, Japan

[A-6-4]MOS LSI Fabrication Process Using Direct Electron Beam Writing

Y. Sakakibara, E. Arai, H. Yoshino, T. Kobayashi, H. Akiya, K. Hirata(1.Musashino Electrical Communication Laboratory, NTT)
https://doi.org/10.7567/SSDM.1978.A-6-4
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