1978 Conference on Solid State Devices

1978 Conference on Solid State Devices

Aug 29 - Aug 30, 1978The Tokyo Chamber of Commerce and Industry, Tokyo, Japan
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International Conference on Solid State Devices and Materials
1978 Conference on Solid State Devices

1978 Conference on Solid State Devices

Aug 29 - Aug 30, 1978The Tokyo Chamber of Commerce and Industry, Tokyo, Japan

[A-6-5]Monte Carlo Simulation of Alignment Mark Signal for Direct Electron-Beam Writing

Naoaki Aizaki(1.Cooperative Laboratories, VLSI Technology Research Association)
https://doi.org/10.7567/SSDM.1978.A-6-5
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