1979 International Conference on Solid State Devices

1979 International Conference on Solid State Devices

Aug 27 - Aug 29, 1979The Tokyo Chamber of Commerce and Industry, Tokyo, Japan
Back
International Conference on Solid State Devices and Materials
1979 International Conference on Solid State Devices

1979 International Conference on Solid State Devices

Aug 27 - Aug 29, 1979The Tokyo Chamber of Commerce and Industry, Tokyo, Japan

[A-1-5]Electron Beam Mask Fabrication for MOSLSI's with 1 μm - 1.5 μm Design Rules

Shinji Okazaki, Kozo Mochiji, Eiji Takeda, Yoji Maruyama, Shojiro Asai(1.Central Research Laboratory, 2.Hitachi, Ltd.)
https://doi.org/10.7567/SSDM.1979.A-1-5
Download PDFDownload PDF
Back