1979 International Conference on Solid State Devices

1979 International Conference on Solid State Devices

Aug 27 - Aug 29, 1979The Tokyo Chamber of Commerce and Industry, Tokyo, Japan
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International Conference on Solid State Devices and Materials
1979 International Conference on Solid State Devices

1979 International Conference on Solid State Devices

Aug 27 - Aug 29, 1979The Tokyo Chamber of Commerce and Industry, Tokyo, Japan

[A-2-6]Anodization of Silicon in RF induced Oxygen Plasma

Ho Quoc VU, Takuo SUGANO(1.Department of Electronic Engineering, 2.the University of Tokyo)
https://doi.org/10.7567/SSDM.1979.A-2-6
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