1979 International Conference on Solid State Devices
Aug 27 - Aug 29, 1979The Tokyo Chamber of Commerce and Industry, Tokyo, Japan
1979 International Conference on Solid State Devices
Aug 27 - Aug 29, 1979The Tokyo Chamber of Commerce and Industry, Tokyo, Japan
[A-3-3]Short Channel MOS FET's Fabricated by Self-Aligned Ion Implantation and Laser Annealing
M. Miyao, M. Koyanagi, H. Tamura, N. Hashimoto, T. Tokuyama(1.Central Research Laboratory, 2.Hitachi Ltd.)
