1980 Conference on Solid State Devices

1980 Conference on Solid State Devices

Aug 26 - Aug 27, 1980The Tokyo Chamber of Commerce and Industry, Tokyo, Japan
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International Conference on Solid State Devices and Materials
1980 Conference on Solid State Devices

1980 Conference on Solid State Devices

Aug 26 - Aug 27, 1980The Tokyo Chamber of Commerce and Industry, Tokyo, Japan

[A-2-5]A New Self-Aligned Framed Mask Method for Selective Oxidation

K. Minegishi, K. Imai, K. Kiuchi, K. Hirata, Y. Yoriume(1.Musashino Electrical Communication Laboratory, NTT)
https://doi.org/10.7567/SSDM.1980.A-2-5
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