1980 Conference on Solid State Devices

1980 Conference on Solid State Devices

Aug 26 - Aug 27, 1980The Tokyo Chamber of Commerce and Industry, Tokyo, Japan
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International Conference on Solid State Devices and Materials
1980 Conference on Solid State Devices

1980 Conference on Solid State Devices

Aug 26 - Aug 27, 1980The Tokyo Chamber of Commerce and Industry, Tokyo, Japan

[A-2-6]Negative Patterning of AZ1350J by Electron-beam Desensitization of Photo-sensitive Compound

Kozo Mochiji, Yoji Maruyama, Fumio Murai, Shinji Okazaki Yutaka Takeda, Shojiro Asai(1.Central Research Laboratory, Hitachi Ltd.)
https://doi.org/10.7567/SSDM.1980.A-2-6
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