1980 Conference on Solid State Devices

1980 Conference on Solid State Devices

Aug 26 - Aug 27, 1980The Tokyo Chamber of Commerce and Industry, Tokyo, Japan
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International Conference on Solid State Devices and Materials
1980 Conference on Solid State Devices

1980 Conference on Solid State Devices

Aug 26 - Aug 27, 1980The Tokyo Chamber of Commerce and Industry, Tokyo, Japan

[A-2-7]High Resolution Fabrication of Submicron Structures by Ion Beam Lithography

Kazuyuki Moriwaki, Hiroaki Aritome, Susumu Namba(1.Faculty of Engineering Science, Osaka University)
https://doi.org/10.7567/SSDM.1980.A-2-7
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