1980 Conference on Solid State Devices

1980 Conference on Solid State Devices

Aug 26 - Aug 27, 1980The Tokyo Chamber of Commerce and Industry, Tokyo, Japan
International Conference on Solid State Devices and Materials
1980 Conference on Solid State Devices

1980 Conference on Solid State Devices

Aug 26 - Aug 27, 1980The Tokyo Chamber of Commerce and Industry, Tokyo, Japan

[A-4-1]High Speed MoSi2 gate CMOS/SOS Devices

Yoshihisa MIZUTANI, Kenji MAEGUCHI, Tohru MOCHIZUKI Minoru KIMURA, Mitsuo ISOBE, Yukimasa UCHIDA, Hiroyuki TANGO(1.Semiconductor Device Engineering Laboratory TOSHIBA CORPORATION)
https://doi.org/10.7567/SSDM.1980.A-4-1