International Conference on Solid State Devices and Materials

1980 Conference on Solid State Devices

Aug 26 - Aug 27, 1980The Tokyo Chamber of Commerce and Industry, Tokyo, Japan

International Conference on Solid State Devices and Materials

1980 Conference on Solid State Devices

Aug 26 - Aug 27, 1980The Tokyo Chamber of Commerce and Industry, Tokyo, Japan

[A-4-3]Custom LSI Process with a Micron Geometry, Partially Using Electron Beam Direct Writing

N. Endo, Y. Kurogi, K. Suzuki, M. Sugimoto, M. Morimoto, Y. Iida, K. Mori(1.Central Research Laboratories, Nippon Electric Co., Ltd.)

https://doi.org/10.7567/SSDM.1980.A-4-3