1980 Conference on Solid State Devices

1980 Conference on Solid State Devices

Aug 26 - Aug 27, 1980The Tokyo Chamber of Commerce and Industry, Tokyo, Japan
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International Conference on Solid State Devices and Materials
1980 Conference on Solid State Devices

1980 Conference on Solid State Devices

Aug 26 - Aug 27, 1980The Tokyo Chamber of Commerce and Industry, Tokyo, Japan

[B-3-5]Non-destructive Analysis of the Si-SiO2 interface by Electron Energy Loss Spectroscopy Study

T. Ito, M. Iwami, A. Hiraki(1.Department of Electrical Engineering, Osaka University)
https://doi.org/10.7567/SSDM.1980.B-3-5
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