1980 Conference on Solid State Devices

1980 Conference on Solid State Devices

Aug 26 - Aug 27, 1980The Tokyo Chamber of Commerce and Industry, Tokyo, Japan
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International Conference on Solid State Devices and Materials
1980 Conference on Solid State Devices

1980 Conference on Solid State Devices

Aug 26 - Aug 27, 1980The Tokyo Chamber of Commerce and Industry, Tokyo, Japan

[B-4-2]Properties of a Fluorinated Heat-Resisting Amorphous-Silicon Containing no Hydrogen

Hideki MATSUMURA, Seijiro FURUKAWA(1.Department of Applied Electronics, Tokyo Institute of Technology)
https://doi.org/10.7567/SSDM.1980.B-4-2
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