1980 Conference on Solid State Devices

1980 Conference on Solid State Devices

Aug 26 - Aug 27, 1980The Tokyo Chamber of Commerce and Industry, Tokyo, Japan
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International Conference on Solid State Devices and Materials
1980 Conference on Solid State Devices

1980 Conference on Solid State Devices

Aug 26 - Aug 27, 1980The Tokyo Chamber of Commerce and Industry, Tokyo, Japan

[B-4-3]Novel Deposition Technique of a-Si:H -- Silane Glow Discharge in Magnetic Field --

T. Hamasaki, M. Hirose, H. Kurata, M. Taniguchi, Y. Osaka(1.Department of Electrical Engineering, Hiroshima University)
https://doi.org/10.7567/SSDM.1980.B-4-3
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